Growth Method |
VGF |
Orientation |
(100)±0.5° (311)A,B±0.5° (111)A,B±0.5° |
Size (mm) |
50.8~100 |
Thickness (μm) |
350±25~625±25 |
TTV (μm) |
≤4 |
Warp (μm) |
≤10 |
Surface |
Side1:Polished Side2:Etched |
Conduction Type |
N-type(S,Sn Dopant) |
P-type(Zn dopant) |
SI-type (Fe doped ) |
EPD(Ave cm2) |
≤100~5000 |
≤5000 |
1500~5000 |
Mobility(cm2/v.s) |
(1.0~5)×103 |
50~100 |
≥1000 |
(300K) Resistivity (Ω·cm) |
N/A |
N/A |
>1.0×107 |
(300K) Carrier Concentration (cm-3) |
(0.5~4.0)×1018 |
N/A |
Package |
Packaged in individual containers in a class 100 clean room environment. |